JPH0334061U - - Google Patents

Info

Publication number
JPH0334061U
JPH0334061U JP9363289U JP9363289U JPH0334061U JP H0334061 U JPH0334061 U JP H0334061U JP 9363289 U JP9363289 U JP 9363289U JP 9363289 U JP9363289 U JP 9363289U JP H0334061 U JPH0334061 U JP H0334061U
Authority
JP
Japan
Prior art keywords
exhaust
plasma processing
processing chamber
hole
exhaust hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9363289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9363289U priority Critical patent/JPH0334061U/ja
Publication of JPH0334061U publication Critical patent/JPH0334061U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP9363289U 1989-08-09 1989-08-09 Pending JPH0334061U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9363289U JPH0334061U (en]) 1989-08-09 1989-08-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9363289U JPH0334061U (en]) 1989-08-09 1989-08-09

Publications (1)

Publication Number Publication Date
JPH0334061U true JPH0334061U (en]) 1991-04-03

Family

ID=31643000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9363289U Pending JPH0334061U (en]) 1989-08-09 1989-08-09

Country Status (1)

Country Link
JP (1) JPH0334061U (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005332985A (ja) * 2004-05-20 2005-12-02 Sanyo Electric Co Ltd 半導体製造装置およびそれを用いて製造した光起電力装置
JP2010186949A (ja) * 2009-02-13 2010-08-26 Nuflare Technology Inc 半導体製造装置および半導体製造方法
JP2016149526A (ja) * 2015-02-12 2016-08-18 エーエスエム アイピー ホールディング ビー．ブイ． 半導体製造装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005332985A (ja) * 2004-05-20 2005-12-02 Sanyo Electric Co Ltd 半導体製造装置およびそれを用いて製造した光起電力装置
JP2010186949A (ja) * 2009-02-13 2010-08-26 Nuflare Technology Inc 半導体製造装置および半導体製造方法
JP2016149526A (ja) * 2015-02-12 2016-08-18 エーエスエム アイピー ホールディング ビー．ブイ． 半導体製造装置

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